www.phase-shift.com is a KLA-Tencor site.

• WaferSight Semiconductor process control system for measuring flatness of 200mm and 300mm polished wafers.

• NanoMapper Semiconductor process control system for measuring nanotopography on 200mm and 300mm polished wafers.

  • NanoMapper FA fab-ready automation for nanotopography metrology.

• MicroXAM 3D non-contact surface mapping profiler for surface analysis and roughness.

  • MicroXAM RTS 3-D measurement of roughness, texture and asperity at sub-angstrom level
  • RollXAM portable surface mapping optical profiler

• P-16+ 3D benchtop stylus profiler

• Alpha-Step IQ benchtop two dimensional stylus profiler

• HRP-350 stylus profiler for semiconductor production

• HRP-250 stylus profiler for semiconductor wafer measurement

We can also provide custom instrumentation for your special measurement needs. Contact KLA-Tencor's ADE Division at
tel: (520)573-9250

fax (520)573-9355

Applications for these products

Laser ablation calibration analysis

Laser texture analysis

Duboff analysis

Polymer surface roughness

Bearing surface wear

Coated paper roughness

Printing plate etch depth

Silicon wafer step height

Thick-film conductor thickness

Micro-machining (MEMS)

Wafer fab automated metrology

Silicon wafer geometry

Roughness, texture and asperity analysis

Contact lens surface measurement

Intraocular lens testing

Molds

C4 bump measurement

Co-Planarity

Related products by application:

Data Storage Metrology Products

Surface Measuring Products

Semiconductor Metrology Products

Other KLA-Tencor products