Laser Ablation Calibration

Surface measurement of microstructure for calibrating lasers

Laser focus and power can be calibrated using 3D surface volume measurements by MicroXAM, a non-contact three dimensional optical profiler.

Micro structures are easily measured, and their displacement and volume can be calculated, by scanning depth and width. 3-dimensional measurements provide data on depth, breadth and width (x,y,z). For large areas, or where high data density or high slope sensitivity is desired stitching multiple maps into one larger map is a means to accurately extend the capabilities of the objective. Even relatively large fields of view can be measured with reliability. ADE Phase Shift's white light profiler, MicroXAM, can be used to characterize micro-electronic mechanical systems (MEMs) with unrivalled resolution in height and lateral detail.

The above image of a laser ablation volume is a three dimensional hybrid height/solid model plot, with the top surface shape removed, or mathematically flattened. The resulting volume can be calculated using MicroXAM's analysis software. The measurement was taken by a tabletop version of the MicroXAM.