Optical profilometry using non-contact 3D
interference microscopy produces a high-precision three dimensional
measurement of the surface character of many materials. Vertical precision
may be as precise as fractions of a nanometer (i.e., in angstroms).
Using a wavelength of light as the standard or measurement,
surface peaks, valleys and slopes are accurately and repeatably
measured using NIST-traceable processes - and without contacting surfaces.
The resulting plot contains reliable two
dimensional cross-sections in any direction across the surface,
and can be used to produce precise calculations
of volume, including voids, wear, pits, grooves and failure marks,
as well as solid displacement,
relative flatness, average (relative) height variations, frequency and
placement of peaks, size and shape of plateaus, tendency of a texture
to depart from a mean, the presence and shape of surface flaws, roughness
and asperity the accuracy or precision of manufacturing, and so
forth.
Industry standard statistics are stored in reports or as graphical
data. ASCII data files are based on University of Birmingham specified
(UDF) format, for statistical surface analysis. Means, averages and
standard deviations are calculated, stored, and displayed. Configuration
options allow the process engineer to select the essential information
for display, while the report retains all of the statistics for review
and manipulation by spreadsheet.
