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Co-planarity measurement co-planarity metrology is best by stylus profiling
  • Co-planarity can be measured with stylus profilers.

 

Co-planarity characteristics:

Within surface mount technology processes -- joining IC chips to an interconnect package -- coplanarity is a measurement of the height of interconnect leads and/or C4 bumps, to see if they will solder uniformly when mated.

The measurement of coplanarity of separate points in space, as in measuring whether or not flip chip components are coplanar, is difficult. The difficulty arises because of the relative wideness of spacing of the interconnects or C4 bumps, the planarity of which must be compared to each other independent of the substrate, because substrate flatness is not an essential component of the coplanarity parameter.

 

Products for this application

Stylus profiler P-16+

Other KLA-Tencor products

Related applications

C4 bump measurement

Surface measurement 2D profiles

3D profiling of surfaces

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