Dimensional and surface measuring products
Choose a product name to go to a description of its features and
applications.
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WaferSight Semiconductor process control
system for measuring flatness of 200mm and 300mm polished wafers.
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NanoMapper Semiconductor process control
system for measuring nanotopography on 200mm and 300mm polished wafers.
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MicroXAM 3D non-contact surface mapping
profiler for surface analysis and roughness.
- MicroXAM RTS 3-D measurement
of roughness, texture and asperity at sub-angstrom level
- RollXAM portable surface
mapping optical profiler
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MiniFiz Fizeau interferometer for flat,
concave or convex surface testing and wavefront transmission.
P-16+ 3D benchtop stylus profiler
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Alpha-Step IQ benchtop two dimensional stylus profiler
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HRP-350 stylus profiler for semiconductor production
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HRP-250 stylus profiler for semiconductor wafer measurement
We can also provide custom instrumentation for your special measurement
needs. Contact KLA-Tencor's ADE Division at
tel: (520)573-9250
fax (520)573-9355
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Applications for these products
Laser ablation calibration
analysis
Laser texture analysis
Duboff analysis
Polymer surface roughness
Bearing surface wear
Coated paper roughness
Printing plate etch depth
Silicon wafer step height
Thick-film conductor thickness
Micro-machining (MEMS)
Flat optics
Wafer fab automated metrology
Silicon
wafer geometry
Concave optics surface quality
measurement
Spherical optics measurements
Phase-shifting interferometry
Parallelism and Wedge
Transmitted wavefront
quality
Prism testing
Hard disk flatness
Roughness, texture and asperity
analysis
Contact lens surface measurement
Intraocular lens testing
Molds
C4 bump measurement
Co-Planarity
Related products by application:
Data Storage Metrology Products
Surface Measuring Products
Semiconductor
Metrology Products
Other KLA-Tencor products
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