• Interference microscope station with phase shifting head.

• R-theta stage with large diameter table for 300mm wafer.

• Tilting optical head (large angle) and tilting table (small angle, orthogonal).

• High-resolution, low-noise digital camera.

• Vibration isolated granite base.

• Acoustic enclosure available.

• Non-contact profiler

• Measures step heights from less than a nanometer (.001 micron, or 10 Angstrom) up to millimeters!

• No stylus

• True three-dimensional measurements

• Faster than stylus profiling, but more repeatable

• Ultra-precise height sensitivity

• Low cost of ownership

Measurement features:

• 3-D surface mapping

• Quantitative, visual and confocal modes using optical interferometry

• Standard 2D and 3D surface statistics including summit and valley analyses and University of Birmingham specified S-parameters

• Non-contact high precision Surface Profiler

• NIST traceable correlation

Software features:

• Comprehensive graphical software for the acquisition, analysis, manipulation and visualization of data

• Calculation of surface statistics including summit and valley analysis

• Fourier and autocovariance analysis and surface filtering

• Polynomial fitting, data filtering, scaling, masking and interpolation

• Interactive zoom

• X-Y and line segment profiles

• 3D wire, hybrid and solid plots

• Area difference plot for step height measurement

• Fourier analysis for visualizing and characterizing periodic structures in surface maps

• Stitching of measurements to form a large scale, high-density map

Physical features:

• Autofocus simplifies measurements

• Upgradeable Pentium computer

• Options include various objectives, and multiple magnification wheel

• Motorized or manual z-stage and stage fixture configurations, accommodating nearly any test sample

Non-contact 3D surface profiler

Measures roughness, finish and texture of surfaces ranging from highly polished optics, wafers and disk media to rough surfaces such as rolled steel and aluminum, paper, plastics, and ceramics. Characterize 3D microstructure such as micro-electronic mechanical systems (MEMs). Optional specialized applications are available, for example analysis of laser texture on disk media.

Research flexibility, yet speed for process control

Once R&D has refined the process, the instrument readily adapts to production process control. A DSP-based video digitizer, optimized software, and the fastest Pentium processor permit throughput rates that are critical on the production floor.

Essential information immediately displayed

Regardless of the application, MicroXAM's software is designed for industrial use. Industry standard statistics are stored in reports or as graphical data. ASCII data files are based on University of Birmingham specified (UDF) format, for statistical surface analysis. Means, averages and standard deviations are calculated, stored, and displayed. Configuration options allow the process engineer to select the essential information for display, while the report retains all of the statistics for review and manipulation by spreadsheet.