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MiniFIZ

  • MiniFIZ has a complete set of fixtures and mounts

Surface mapping Fizeau interferometer

 

Product Highlights:

  • Fizeau interferometer
  • Measurement features:
    • Able to accurately repeat measurements over a wide range
    • Fast measurement and presentation of results (less than 7 seconds total)
    • Environment monitoring waits for quiet period for best measurement
  • Software features:
    • Software monitoring of environment prevents corrupted measurements
    • Advanced algorithms minimize measurement error due to vibration
    • Complete, selectable RVA software analysis available
    • Pentium based system insures compatibility and future upgrades
  • Physical features:
    • Stable, stiff rail structure allows measurements without the use of an air table
    • Some mounts allow vertical testing
    • Stress-free, repeatable mounting— no need for constant fine adjustment
    • Total unit has a small footprint and is lightweight
    • Horizontal or vertical operation
    • Stabilized laser prevents light level variations, allows testing over long path lengths
    • Easily integrates into automated process lines

 

An Overview

MiniFIZ is a laser-based instrument capable of sub-nanometer non-contact surface metrology. Featuring a modular structure, which allows customization to any application, MiniFIZ always reflects the highest standards of accuracy, durability, and speed.

MiniFIZ assesses flatness, sphericity and wavefront transmission. Special applications are already available for the optics industry: super-accurate testing of prisms, corner cubes, flats and radius of curvature. In the hard disk industry, flatness and static RVA analysis application options are used on high volume production lines for process control.

A stable instrument for accurate and repeatable measurements

The compact design is stiff and stable, while its light weight and small footprint allow easy relocation. The optional rail set rigidly combines the holder mount with the interferometer. In many environments, this arrangement can be used without a vibration-isolation table.

The system has a high throughput which derives partly from the repeatability of the various optional holders. Samples place easily on the holder and maintain alignment. Tip-tilt adjustment to align the interference fringes is rarely needed, saving time.

Environmental monitoring during measurement

Often a transient event will occur — such as a door closing — disrupting the measurement process. MiniFIZ monitors the level of vibrations affecting the fringe patterns and waits until the vibrations diminish to make a measurement. This ensures an accurate measurement.

Full set of accessories and options

MiniFIZ's modular structure allows the purchase of a system tailored for every need. Choose from 50, 100, or 150mm (2", 4", and 6") apertures for a full variety of applications. Enjoy the flexibility of 100mm and 150mm apertures in one instrument with the 4 to 6" Aperture Converter Accessory.

Regardless of the option package, every MiniFIZ passes the same high standard of factory quality assurance -- so that you can see more detail, do more measurements, and do them faster than with any other system. 

Applications for this product

Reflective disk flatness (RVA)

Concave optics

Flat optics - wedge

Lenses

Wavefront transmission

Fiber optics

Prism tests

 

Related products

Spherical Optics

Reference Flats

Other KLA-Tencor products

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