• Whole wafer topography analysis for 200mm and 300mm stored raw maps
• Clean room remote recipe generation and editing capable
• Enables detailed analysis without impinging production availability of NanoMapper
• Complete analytical and 3D visualization software with separate license
• Full documentation and support
• Removable hard disk data transfer — no need to bog down network bandwidth
• Stand-alone wafer nanotopography measurement analysis workstation
• Allows desktop recall of NanoMapper data
• Use with both NanoMapper Standard and NanoMapper FA
• Software features:
  • Measure nanotopography to the edge of the wafer
  • Single-statistic pass/fail threshold curve analysis
  • User editable recipes

A money-saving accessory for NanoMapper

NanoMapper OASys (Offline Analysis System) is a cost-effective accessory for the NanoMapper engineer. The NanoMapper OASys permits review and analysis of wafer topography data using an independent, off-line analysis package. The OASys supports full off-line recipe creation and editing as well as batch mode re-processing of previously acquired raw wafer data files. Troubleshoot process excursions and nanotopology defects outside of the cleanroom without impacting system throughput or performance.

Easy data access

File transfers between NanoMapper and OASys may be accomplished using a floppy disk (recipes), a removable 2 GB drive (maps), or a LAN, if connected. With all the analytical capability of the NanoMapper plus convenient access to large amounts of data, install OASys wherever it is most convenient. A Win98 OS, a large display screen, and plenty of fast disk space makes the OASys ideal for preparing technical presentations using your favorite software.