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Roughness texture analysis

 

Roughness and asperity measurements with optical profilers:

Asperity and roughness analysis puts ADE Phase Shift at the forefront of precision engineered surface metrology. Use one of the MicroXAM models for asperity and roughness analysis; each features full surface analysis software. Above, a three dimensional model of a surface with sub-nanometer-scale asperity.

To increase lateral roughness resolution, multiple images can be stitched together to form a larger image. Image stitching can also be advantageous in allowing a full sampling of a small area using stronger objectives, which have high slope sensitivity.

MicroXAM is the benchmark instrument for non contact optical profiling.

Measurements feature excellent accuracy and repeatability. MicroXAM's one button operation is ideal for production environments (please contact Phase Shift for sample measurements).

• Texture of rolling marks on rolled metal

Whether engineering a surface for wear, optical characteristics, friction or hardness, or tribology of fluids (as in the case of lithographic rolls), MicroXAM's detailed three-dimensional surface analysis can optimize your results and help you maintain your process.  

Measuring roughness and texture using stylus profilometry

Stylus profiling is suitable for measuring such things as surface roughness on new material films. It is an effective method to quantify the material film surface roughness parameters, providing measurement accuracy that can be processed in-line at high wafer throughputs. Both high resolution stylus metrology, for greatest precision, and high speed profiling, for production throughput, are able to measure roughness. For example, comparisons show good correlation in measuring wafers with poly surface roughness of about 20 to 30 Angstroms between the two stylus profiling modes, and good correlation from them to TEM analysis.