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Stylus profiler Alpha-Step IQ

Stylus profiler Alpha-Step IQ

Stylus Profiler for Surface Measurement:

Stylus profiling with Alpha-Step IQ provides advanced and customizable 2D analysis capabilities.
Improved stylus profiling acquisition time because of easy location of measurement features via saved site image with recipe.
Features excellent stylus profilometry surface measurement repeatability and reproducibility.
Precisely determines and analyzes thin step heights, surface microroughness, and overall form error on thin film coatings.
Provides sufficient vertical range for large topography variations.
Includes multiple language support for users with a worldwide presence.
Enables faster analysis routines by applying saved sets of analysis instructions.

Stylus-based surface profiler Alpha-Step IQ is state-of-the-art, combining high measurement precision with versatility and value. Ideal for surface profiling applications such as semiconductor pilot lines and materials research, this advanced stylus profiler enables faster process learning and higher yields. With guaranteed 8Å (1 sigma) or 0.1% step height repeatability and sub-angstrom resolution, the Alpha-Step IQ stylus profiler provides excellent repeatability and performance to analyze and monitor processes.

Comprehensive Surface Metrology Solutions
The P-16 and P-16OF (3D benchtop stylus profiler), Alpha-Step IQ (2D benchtop stylus profiling), HRP 250/350 series (high resolution stylus profiler) provide comprehensive surface metrology analysis and surface topography control solutions to meet the needs of the most demanding profiling applications.

Applications for this product

MEMS, microlenses

Roughness, texture and asperity

Laser texture bumps

Related products

Stylus profiler HRP 250

High resolution profiler HRP 350

Stylus profiler P-16+

MicroXAM optical profiler

Other KLA-Tencor products

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