Stylus profiler P-16+

• Stylus profiler P-16+

 

Advanced Contact Stylus Surface Profiler:

The Model P-16+ and P-16 OF+ (open frame) contact stylus profiler delivers automated step height, surface contour, waviness and roughness measurements with detailed 2D or 3D analysis of topography for a variety of surfaces and materials. This general-purpose programmable surface metrology tool is capable of being utilized in a wide range of applications and industries, from R&D departments and universities to production and process monitoring. Common applications include CMP monitoring and bump metrology (semiconductor), thin film step height and stress analysis (material science), thin film head structure definition (data storage), microlens and diffuser shape (optoelectronics), etch rates and trench depth analysis (MEMS) as well as surface characterization of a variety of micro and nano structures in materials that are used across many industries from the general surface machining to biomedical devices.

With its user friendly and powerful Apex software, the P-16+ stylus profiler has the capability to create custom reports, apply a variety of ISO standard filtering methods and unique leveling techniques, set tolerance limits for statistical process control metrics, calculate stress, bearing ratio, distance, volume, density, flatness, peak count distribution as well as an extended list of parameters for step height, roughness and waviness measurements. Apex software is also available in several languages to support our worldwide customer base. New to the P16+ is a 3D Stress option.

The system’s 20-site Sequencing feature as a standard configuration is essential to those customers who need the added convenience of automated wafer-mapping. For the power user, the Productivity Package is the ideal solution to significantly improve overall throughput and productivity. The P-16+ also introduces the added benefit of RoHS compliant computer and peripherals as well as compliance to Semi S2 (safety), S8 (ergonomics) and S14 (fire protection) standards.

 

Comprehensive Surface Metrology Solutions

The P-16+ and P-16OF+ (3D benchtop surface profiling), Alpha-Step IQ (2D benchtop surface profiling), HRP 250/350 series (high resolution surface profiling) provide comprehensive stylus surface metrology analysis and surface topography control solutions to meet the needs of the most demanding profiling applications.