Products Support News Events Company Investors
Contact Keep Me Posted Home

 www.phase-shift.com is a KLA-Tencor site.

Linear Surface Profile Metrology

2D linear profile from 3-D
  • 2D linear profile from a 3D measurement

 

2D line profiling from 3D a measurement

 

Surface shape profiles, including surface texture, peak-to-valley and Ra surface roughness measurements are imbedded in three dimensional surface measurements, and can be extracted as linear profiles at any location or direction in the 3D data.

Surface profile measurement software provided with the ADE Phase Shift optical profiler MicroXAM allows you to draw profiles which are linear and radial, and automatically calculate step height or peak to valley data on the fly as the profile location alters at the click of a mouse.

Correllation between the height sensitivity of a stylus profiler and a MicroXAM optical profiler is extremely precise. 

Products for this application

 

MicroXam

MicroXam RTS

RollXam

 

Related applications

 

Volume displacement analysis

3D profiling of surfaces

For more information about this topic:

Please fill out the following, and press the SUBMIT button. Privacy Policy.

Your Name*
E-mail*
Phone*
Fax 
Company*
Address1
Address2
City
State/Region*
Zip/Mailing code
Country*
Comments & questions you have about this product or application
How did you hear about us?
(Check all that apply)

Business Associate
Internet Search
Magazine Ad
Trade Show Booth
*Required fields
 
 
 
Copyright ©2008, KLA-Tencor ADE Division, and/or its licensors, All Rights Reserved. Search KLA-Tencor ADE Division: