• ADE Home >
• ADE Phase Shift Home  >
• ADE Products >
• Semiconductor Flatness >
• WaferSight >

WaferSight™ OASys™

Offline Analysis Workstation for WaferSight Data

• WaferSight OASys™ workstation

Product Highlights:

• Flatness and shape analysis for 200mm and/or 300mm stored raw data files
• Cleanroom remote recipe generation and editing capable
• Enables detailed wafer analysis without impinging production availability of WaferSight
• Complete analytical and 3D visualization software
• Full documentation and support
• High density storage device for data transfer or storage
• Software features:
• Site analysis and reporting WaferSight recipe generation
• 3D surface and contour maps
• Zoom and pan for Front, Back, Shape, and Thickness Maps
• Individual wafer and batch re-processing
• X-Y, diameter and radial profiles

A money-saving accessory for WaferSight

• WaferSight OASys allows you to set up recipes for processing, or review data in the context of a recipe.

WaferSight OASys (Offline Analysis System) is a cost-effective accessory for the WaferSight engineer. The WaferSight OASys permits review and analysis of wafer surface, shape, and thickness maps using an independent, off-line analysis package. The OASys supports full off-line recipe creation and editing as well as batch mode re-processing of previously acquired raw wafer data files. Troubleshoot process excursions and wafer dimensional defects outside of the cleanroom without impacting system throughput or performance.

Easy data access

File transfers between the WaferSight and OASys can be accomplished using a mass media storage device or high-speed LAN connection. Large hard drive disk space and fast processors provide a quick analysis platform for the process engineer.